MICROMACHINED CORNER CUBE REFLECTORS AS A COMMUNICATION LINK

This paper proposes using a micromachined corner cube reflector to tra nsmit data digitally by modulating reflected light intensity. Corner c ube reflectors ranging in size from 100 to 200 mu m have been built us ing hinged polysilicon plates. The reflectivity of polysilicon has bee n measured to be 24% and the total reflected power from the corner cub e has been measured to be between 1 to 2% of the incident power. Ortho gonality between plates is within roughly 8 mrad. Reflection from indi vidual polysilicon plates has been modulated using electrostatic actua tion with an applied voltage as low as 8 V.