Y. Lefevre et al., FIRST STEPS TOWARDS DESIGN, SIMULATION, MODELING AND FABRICATION OF ELECTROSTATIC MICROMOTORS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 645-648
Following the principles proposed by workers at Berkeley University, w
e have developed a version of the electrostatic micromotor based on th
e sacrificial layer method combined with oxidation of the rotor. In or
der to study the behaviour of this electrostatic micromotor, we have e
laborated two softwares. The first, called EFCREL, is to simulate the
static operation of the electrostatic micromotors and the second, call
ed EFDYN, is to simulate their dynamic operation. Both are based on a
finite-element code, called EFCAD, for electromagnetic field computati
on. They help us with the design of the fabricated micromotor and the
simulation of its dynamic working, respectively. The elaboration of th
ese two softwares represents our first steps towards a fully integrate
d CAD (computer aided design) system for micromotors.