Dv. Novikov et al., PLANE-WAVE GID TOPOGRAPHY OF DEFECTS IN LITHIUM-NIOBATE AFTER DIFFUSION DOPING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 97(1-4), 1995, pp. 342-345
Grazing-incidence diffraction (GLD) synchrotron radiation X-ray topogr
aphy was used for a depth-resolved investigation of the defect structu
re of LiNbO3 after surface diffusion doping. Lattice and misfit disloc
ations as well as strain fields were detected. The method is shown to
be effective even for strongly damaged crystals and offers significant
advantages for characterization of single crystals and non-perfect ep
itaxial films.