E. Zolotoyabko et al., VISUALIZATION OF ACOUSTIC FIELDS IN SURFACE-ACOUSTIC-WAVE DEVICES BY MEANS OF X-RAY TOPOGRAPHY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 97(1-4), 1995, pp. 346-350
Reflection X-ray topographs from acousto-optic devices were measured u
nder surface acoustic wave excitation. Enhanced sensitivity to small u
ltrasound amplitudes was achieved when the ultrasound wavelength was s
horter than the X-ray extinction length. Under this condition an X-ray
diffraction image of a high-frequency traveling surface acoustic wave
was obtained despite the strains in the device caused by microelectro
nic processing.