THICKNESS DETERMINATION OF THIN SOLID FILMS BY ANGLE-RESOLVED X-RAY-FLUORESCENCE SPECTROMETRY USING MONOCHROMATIZED SYNCHROTRON-RADIATION

Authors
SCHMITT W DROTBOHM P ROTHE J HORMES J OTTERMANN CR BANGE K
Citation
W. Schmitt et al., THICKNESS DETERMINATION OF THIN SOLID FILMS BY ANGLE-RESOLVED X-RAY-FLUORESCENCE SPECTROMETRY USING MONOCHROMATIZED SYNCHROTRON-RADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 97(1-4), 1995, pp. 407-411
Citations number
16
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
97
Issue
1-4
Year of publication
1995
Pages
407 - 411
Database
ISI
SICI code
0168-583X(1995)97:1-4<407:TDOTSF>2.0.ZU;2-N
Abstract
Thickness measurements by the method of angle-resolved, self-ratio X-r ay fluorescence spectrometry (AR/SR/XFS) have been carried out on thin solid films using monochromatized synchrotron radiation at the Bonn s torage ring ELSA. Synchrotron radiation was monochromatized by means o f a double-crystal monochromator and fluorescence radiation was detect ed by a Si(Li) semiconductor detector. The results for sample systems consisting of Au on Si, Cr on SiO2 and TiO2 on alkali-free glass are v ery satisfactory and agree well with results obtained by other methods .