INVESTIGATION OF THE DYNAMIC-RESPONSE BEHAVIOR OF ISFET PH SENSORS BYMEANS OF LASER-DOPPLER VELOCIMETRY (LDV)

Authors
OELSSNER W ZOSEL J BERTHOLD F KADEN H
Citation
W. Oelssner et al., INVESTIGATION OF THE DYNAMIC-RESPONSE BEHAVIOR OF ISFET PH SENSORS BYMEANS OF LASER-DOPPLER VELOCIMETRY (LDV), Sensors and actuators. B, Chemical, 27(1-3), 1995, pp. 345-348
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
27
Issue
1-3
Year of publication
1995
Pages
345 - 348
Database
ISI
SICI code
0925-4005(1995)27:1-3<345:IOTDBO>2.0.ZU;2-A
Abstract
The dynamic response behaviour of ISFET pH sensors with different form s of encapsulation was investigated in flow cells by laser Doppler vel ocimetry (LDV). At a mean flow velocity of 8 cm/s, response times t(5- 95%) varied between 0.3 and 2.0 s, depending on the geometry of the IS FET sensor, the direction of flow relative to the chemically sensitive region and the direction in which the pH value changed. The effect of the cavity containing the sensitive region on the response times of f ully encapsulated sensor chips during measurements in low viscosity fl uids is smaller than generally assumed.