AMPEROMETRIC MICROELECTRODE ARRAY IN CONTAINMENT TECHNOLOGY

Authors
HINKERS H SUNDERMEIER C LURICK R WALFORT F CAMMANN K KNOLL M
Citation
H. Hinkers et al., AMPEROMETRIC MICROELECTRODE ARRAY IN CONTAINMENT TECHNOLOGY, Sensors and actuators. B, Chemical, 27(1-3), 1995, pp. 398-400
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
27
Issue
1-3
Year of publication
1995
Pages
398 - 400
Database
ISI
SICI code
0925-4005(1995)27:1-3<398:AMAICT>2.0.ZU;2-V
Abstract
A new transducer concept for miniaturized amperometric sensor arrays i s presented. A KCI-containing electrolyte for oxygen measurements is a nchored inside the microcontainments of a silicon chip together with t he working and reference electrodes. The fabrication process is planne d as a full wafer process for low-cost mass production with a narrow v ariability. First measurements are presented and the problems and adva ntages of the containment concept discussed.