P. Fabry et al., USE OF AMORPHOUS-SILICON THIN-LAYERS AS AN ELECTRICAL TRANSDUCER IN AN ION ELECTROCHEMICAL SENSOR, Sensors and actuators. B, Chemical, 27(1-3), 1995, pp. 407-410
A thin layer of hydrogenated amorphous silicon (a-Si:H) has been depos
ited by PECVD on a NASICON (Na+ super ionic conductor) pellet used as
a Na+-sensitive membrane. The conductivity of a-Si:H films has been ch
aracterized and a dependence on the Na+ concentration has been noticed
. This effect can be explained by a variation of the space charge at t
he a-Si:H-NASICON interface. A new sensor based on this transducing mo
de is proposed.