J. Lowe et S. Holdcroft, SYNTHESIS AND PHOTOLITHOGRAPHY OF POLYMERS AND COPOLYMERS BASED ON POLY(3-(2-(METHACRYLOYLOXY)ETHYL)THIOPHENE), Macromolecules, 28(13), 1995, pp. 4608-4616
Electronically conducting polythiophenes functionalized with methacryl
ate side chains have been synthesized and characterized. irradiation w
ith UV-visible light leads to photochemical crosslinking and insolubil
ization of the polymer films. The minimum gel dose required to leave a
n insoluble residue for thacryloyloxy)ethyl)thiophene-co-3-hexylthioph
ene] was 2.6 mJ cm(-2) and the dose required to obtain 50% insolubiliz
ation was 24 mJ cm(-2). Films of the homopolymer, poly(3-(2-(methacryl
oyloxy)ethyl)thiophene), were Lithographically more sensitive than the
copolymer as indicated by the lower gel dose (1.2 mJ cm(-2)) and lowe
r dose required for 50% insolubilization (13.4 mJ cm(-2)). Polymer fil
ms were imaged by conventional semiconductor photolithography. Pattern
ed images were obtained having film thicknesses of 75 nm and a resolut
ion of 3 mu m. Films doped with gold trichloride achieved conductiviti
es up to 12 S cm(-1).