DETERMINATION OF THICKNESS MAPS OF THIN COATINGS BY EDS EPMA

Authors
BENHAYOUNE H JBARA O THOMAS X CAZAUX J
Citation
H. Benhayoune et al., DETERMINATION OF THICKNESS MAPS OF THIN COATINGS BY EDS EPMA, X-ray spectrometry, 24(3), 1995, pp. 147-151
Citations number
10
Categorie Soggetti
Spectroscopy
Journal title
X-ray spectrometry → ACNP
ISSN journal
00498246
Volume
24
Issue
3
Year of publication
1995
Pages
147 - 151
Database
ISI
SICI code
0049-8246(1995)24:3<147:DOTMOT>2.0.ZU;2-L
Abstract
new experimental procedure for the measurement of the thickness of thi n coatings on substrates is presented. Based on the experimental deter mination of the electron backscattering coefficient eta (via the measu rement of the electric current of the correctly polarized specimen hol der), the number of reference specimens to be used for the calibration during measurements can be reduced. Thickness maps free of artifacts associated with local changes in the substrate composition illustrate the proposed methods.