M. Radecka et M. Rekas, THE STUDIES OF HIGH-TEMPERATURE INTERACTION OF NB-TIO2 THIN-FILMS WITH OXYGEN, Journal of physics and chemistry of solids, 56(8), 1995, pp. 1031-1037
The kinetics of oxygen interaction with Nb-doped TiO2 thin films were
studied within the temperature range 900-1300 K. The equilibration tim
e is rather long, of the order of several hours. Such slow kinetics in
dicates that the rate of equilibrium may be governed by the chemical d
iffusion. The effects of the film thickness on the kinetics were also
studied. It has been postulated that the motion of cation vacancies is
responsible for the bulk diffusion process in material studied. The c
hemical diffusion coefficient and its temperature dependence were dete
rmined.