TPD AND ESD OF HYDROGEN FROM DISILANE COVERED SI(100)

Disilane covered Si(100) was investigated using temperature programmed desorption (TPD) and electron stimulated desorption (ESD) for various disilane exposures. At low coverages, only monohydride species are ob served-on the surface as seen by TPD. At high coverages, dihydride spe cies appear. Kinetic energy distributions (KEDs) for H+ and H- were al so obtained from Si(100) covered with varying amounts of disilane. Bot h H+ and H- KEDs exhibited two peaks each, suggesting that there are a t least two types of hydrogen bound states on the surface. ESD decay c urves were also obtained and exhibited double exponential decay behavi or. ESD total cross sections were calculated using H+ and H- signal de cays and compared with related data from the literature.