ELECTRONIC-STRUCTURE AND OPTICAL-PROPERTIES OF ALPHA-PHASE AND BETA-PHASE OF SILICON-NITRIDE, SILICON OXYNITRIDE, AND WITH COMPARISON TO SILICON DIOXIDE

Authors
Citation
Yn. Xu et Wy. Ching, ELECTRONIC-STRUCTURE AND OPTICAL-PROPERTIES OF ALPHA-PHASE AND BETA-PHASE OF SILICON-NITRIDE, SILICON OXYNITRIDE, AND WITH COMPARISON TO SILICON DIOXIDE, Physical review. B, Condensed matter, 51(24), 1995, pp. 17379-17389
Citations number
95
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
01631829
Volume
51
Issue
24
Year of publication
1995
Pages
17379 - 17389
Database
ISI
SICI code
0163-1829(1995)51:24<17379:EAOOAA>2.0.ZU;2-P