ETCHING NANOMETER-SIZED HOLES OF VARIABLE DEPTH FROM CARBON CLUSTER-IMPACT INDUCED DEFECTS ON GRAPHITE SURFACES

Authors
BRAUCHLE G RICHARDSCHNEIDER S ILLIG D ROCKENBERGER J BECK RD KAPPES MM
Citation
G. Brauchle et al., ETCHING NANOMETER-SIZED HOLES OF VARIABLE DEPTH FROM CARBON CLUSTER-IMPACT INDUCED DEFECTS ON GRAPHITE SURFACES, Applied physics letters, 67(1), 1995, pp. 52-54
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
67
Issue
1
Year of publication
1995
Pages
52 - 54
Database
ISI
SICI code
0003-6951(1995)67:1<52:ENHOVD>2.0.ZU;2-J