ENHANCED HYDROGENATION AND ACCEPTOR PASSIVATION IN SI BY PRESSURIZED-WATER BOILING

Authors
OHMURA Y OTOMO Y TAGO Y TERAKADO N SATOH T
Citation
Y. Ohmura et al., ENHANCED HYDROGENATION AND ACCEPTOR PASSIVATION IN SI BY PRESSURIZED-WATER BOILING, Applied physics letters, 67(1), 1995, pp. 64-66
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
67
Issue
1
Year of publication
1995
Pages
64 - 66
Database
ISI
SICI code
0003-6951(1995)67:1<64:EHAAPI>2.0.ZU;2-Z