MAPPING OF SUBSURFACE INHOMOGENEITIES IN SEMICONDUCTORS USING DIFFERENTIAL REFLECTANCE MICROSCOPY

Authors
TANN J GAL M
Citation
J. Tann et M. Gal, MAPPING OF SUBSURFACE INHOMOGENEITIES IN SEMICONDUCTORS USING DIFFERENTIAL REFLECTANCE MICROSCOPY, Applied physics letters, 67(1), 1995, pp. 118-120
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
67
Issue
1
Year of publication
1995
Pages
118 - 120
Database
ISI
SICI code
0003-6951(1995)67:1<118:MOSIIS>2.0.ZU;2-F