SrS:Ce thin films were prepared on several kinds of insulating underla
yers, Ta2O5, SiO2, Si3N4 and their composite films, by hot wall deposi
tion. The crystallinity of the SrS:Ce films was found to depend strong
ly upon the underlayers, although no crystal structures were confirmed
for the underlayers. The SrS:Ce films grown directly on Ta2O5 layers
gave the best crystallinity, and better luminance levels were also obt
ained for their electroluminescent devices, due to both the large diel
ectric constant of Ta2O5 and good crystallinity of the SrS:Ce films.