SUPERSTOICHIOMETRIC H-BN FILMS SYNTHESIZED BY ION-BEAM-ASSISTED DEPOSITION - N-CONCENTRATION AND RESPECTIVE ION ENERGY-DISSIPATION

Authors
GRIGOROV KG GRIGOROV GI VIGNES JL LANGERON JP
Citation
Kg. Grigorov et al., SUPERSTOICHIOMETRIC H-BN FILMS SYNTHESIZED BY ION-BEAM-ASSISTED DEPOSITION - N-CONCENTRATION AND RESPECTIVE ION ENERGY-DISSIPATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 100(4), 1995, pp. 505-506
Citations number
4
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
100
Issue
4
Year of publication
1995
Pages
505 - 506
Database
ISI
SICI code
0168-583X(1995)100:4<505:SHFSBI>2.0.ZU;2-E
Abstract
Experimental data on the nitrogen content in films grown by ion-assist ed deposition are compared to the specific energy (per film atom) diss ipated by the ions in displacement damage. As shown there exists a pro portionality between the overstoichiometric N content and the energy d issipated in a superficial layer of the growing film.