DEUTERIUM DEPTH DISTRIBUTION IN HELIUM-ION-IRRADIATED NICKEL

Depth distribution of ion-implanted deuterium in polycrystalline nicke l specimens was measured and the effect of preimplanted helium to the deuterium distribution was analyzed by using the elastic recoil detect ion analysis (ERDA) method using 16 MeV O-16(5+) ions. Depth distribut ion of deuterium after helium ion irradiation was in good agreement wi th the depth distribution of damage induced by the helium ions which w as calculated using TRlM9I simulation code, while the distribution in the specimens implanted with only deuterium ion was not clear. It was found that deuterium can easily mi,orate at room temperature in helium -non-irradiated nickel. It was suggested that helium ions introduced v acancy clusters in the irradiated depth region and the implanted deute rium was trapped in the damages.