ERD STUDY OF DEUTERIUM ATOMS IMPLANTED IN GRAPHITE

The present study shows recent progress in the depth profile of deuter ium near the surface of the isotropic graphite and highly oriented pyr olytic graphite (HOPG) obtained by use of the elastic recoil detection (ERD) method, The implantations were made at RT with 8 keV D-2(+) ion s to fluences up to similar to 10(22) ions/m(2). The depth distributio n curves of the deuterium in HOPG and the isotropic graphite were comp ared with each other. It was found that deuterium atoms exist in the d epth range within 100 nm in HOPG. It agrees with the depth profile com puted by using the TRIM3D-code. However, the distribution the isotropi c graphite spreads over the depth range beyond 800 nm.