Molecular beam epitaxy (MBE) has been used to grow high-temperature su
perconducting Bi-Sr-Ca-Cu-O films with adequate control over growth of
number of unit layers. Oxide sources of Sr and Ca used for electron b
eam evaporation have been found to be useful for epitaxial growth of f
ilms. Deposited films show superconducting properties comparable to fi
lms deposited by using pure metals with a complicated in situ oxidatio
n technique. Optimum deposition and annealing conditions have been obt
ained to grow c-axis-oriented 2212 phase BSCCO film. In situ reflectio
n high-energy electron diffraction (RHEED) study of the films has reve
aled the growth of epitaxial films with atomically smooth surfaces.