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ITA
ENG
PARTICLE-EMISSION FROM SI3N4 SURFACE BY EXCIMER-LASER RADIATION
Authors
AKIBA T
AKIMUNE Y
HIROSAKI N
DICKINSON JT
Citation
T. Akiba et al., PARTICLE-EMISSION FROM SI3N4 SURFACE BY EXCIMER-LASER RADIATION, Journal of materials science letters, 14(12), 1995, pp. 898-900
Citations number
8
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters
→
ACNP
ISSN journal
02618028
Volume
14
Issue
12
Year of publication
1995
Pages
898 - 900
Database
ISI
SICI code
0261-8028(1995)14:12<898:PFSSBE>2.0.ZU;2-3