THE EFFICIENCY OF THE ELECTRON SHEATH HEATING IN CAPACITIVELY COUPLEDRADIO-FREQUENCY DISCHARGES IN THE WEAKLY COLLISIONAL REGIME

Authors
BUDDEMEIER U KORTSHAGEN U PUKROPSKI I
Citation
U. Buddemeier et al., THE EFFICIENCY OF THE ELECTRON SHEATH HEATING IN CAPACITIVELY COUPLEDRADIO-FREQUENCY DISCHARGES IN THE WEAKLY COLLISIONAL REGIME, Applied physics letters, 67(2), 1995, pp. 191-193
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
67
Issue
2
Year of publication
1995
Pages
191 - 193
Database
ISI
SICI code
0003-6951(1995)67:2<191:TEOTES>2.0.ZU;2-W