ANALYSIS OF OXIDE DUSTS BY SNMS

The quantitative determination and the depth profile analysis of non-c onductive materials by SNMS and GDOES is possible using a high-frequen cy sputtering technology for discharging. To improve the SNMS with HF sputtering technology for the analysis of environmentally relevant oxi dic dusts, a certified standard ash is used. The quantitative evaluati on has shown a markedly excessive concentration for the alkali element s. Another effect is the appearance of the mass m/e = 20, which can be allocated to an Ar2+ ion. The influences of conductivity of the sampl es, I-IF frequency, rate of sputtertime and of the target voltage on t hese effects have been investigated.