ASSEMBLY FOR MICROMECHANICS AND LIGA

Micromechanical structures must be assembled where monolithic integrat ion is not feasible because of incompatible processes, complex geometr ies or different materials involved. In this way, a system can be buil t up of products from various suppliers, which may promote the develop ment of a market for microsystems. In micromechanics, assembly must es tablish mechanical and fluidic contacts in addition to electrical conn ections. Assembling single components is relatively expensive. This pr oblem may be overcome if batch processes are conducted. A batch proces s for LIGA structures was developed which has been used to make microf luidic components by transferring a diaphragm to microstructures.