A PIEZORESISTIVE GAAS PRESSURE SENSOR WITH GAAS ALGAAS MEMBRANE TECHNOLOGY/

Authors
DEHE A FRICKE K MUTAMBA K HARTNAGEL HL
Citation
A. Dehe et al., A PIEZORESISTIVE GAAS PRESSURE SENSOR WITH GAAS ALGAAS MEMBRANE TECHNOLOGY/, Journal of micromechanics and microengineering, 5(2), 1995, pp. 139-142
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
5
Issue
2
Year of publication
1995
Pages
139 - 142
Database
ISI
SICI code
0960-1317(1995)5:2<139:APGPSW>2.0.ZU;2-8
Abstract
This paper reports on the technology and performance of piezoresistive pressure sensors that utilize GaAs/AlGaAs membranes for pressure tran sduction into stress to induce resistance changes of p doped GaAs resi stors. We have tested the sensor to differential pressure up to 8 x 10 (4) Pa and in a temperature range of room temperature up to 433 K.