Q-FACTOR DEPENDENCE OF ONE-PORT ENCAPSULATED POLYSILICON RESONATOR ONREACTIVE SEALING PRESSURE

Micromachined encapsulated polysilicon resonators have been fabricated in different reactive sealing pressure, 200, 50 and 20 mTorr, in orde r to investigate the dependence of the Q-factors on the sealing pressu re. Q-factors as high as 2700 have been measured. The experimental res ults show that the Q-factors of one-port encapsulated resonators are p roportional to 1/p and the resonant frequency is independent of the se aling pressure. However, the measured Q-factors are more than two orde rs of magnitude lower than theoretical prediction.