ION-BEAM-ASSISTED SPUTTER-DEPOSITION OF YSZ BUFFER LAYERS FOR SUPERCONDUCTING INTERCONNECT APPLICATIONS

Yttria-stabilized zirconia (YSZ) buffer layers have been sputter depos ited onto various substrates including silicon and nickel alloy using ion-beam-assisted deposition (IBAD). This technique resulted in the fo rmation of buffer layers which exhibit strong (100) phase growth as we ll as in-plane orientation as evidenced by x-ray diffraction measureme nts. Subsequent YBCO depositions on these films exhibit T-c values of 86 K and strong biaxial texture with the c axis normal to the surface. With further refinement, this technique may be used to fabricate the multilayer substrate structure needed for superconducting multichip mo dules.