CHROMATO-MASS-SPECTROMETRIC IDENTIFICATION OF THE COMPOSITION OF STILL RESIDUES IN POLYCRYSTALLINE SILICON PREPARATION

Authors
STEPANOV AI CHAPYGIN AM
Citation
Ai. Stepanov et Am. Chapygin, CHROMATO-MASS-SPECTROMETRIC IDENTIFICATION OF THE COMPOSITION OF STILL RESIDUES IN POLYCRYSTALLINE SILICON PREPARATION, Industrial laboratory, 60(9), 1994, pp. 519-521
Citations number
8
Categorie Soggetti
Materials Science, Characterization & Testing","Instument & Instrumentation
Journal title
Industrial laboratory → ACNP
ISSN journal
00198447
Volume
60
Issue
9
Year of publication
1994
Pages
519 - 521
Database
ISI
SICI code
0019-8447(1994)60:9<519:CIOTCO>2.0.ZU;2-6
Abstract
Conditions for chromatographic separation of high-boiling impurities i n still residues of rectification columns for high purification of tri chlorosilane are found. The molecular compositions and retention times for impurities are determined; this is basis for developing analytica l procedures affording control of the technologies for high purificati on of trichlorosilane and utilization of still residues.