THE DEVELOPMENT OF THE KAPTON SIGNAL ROUTER FOR THE SILICON MICROSTRIPS DETECTOR OF L3

A high precision kapton cable to route the signals of the double sided silicon microstrips detector (SMD) to the front-end electronics has b een developed. The mechanical and electrical properties of this cable are stable against variations in humidity and temperature and maintain the cross talk between adjacent lines below 3%. Electron beam photoli thography and chemical etching have been used to produce a very dense signal router: 744 L shaped strips on a surface of similar or equal to 140 mn X 40 mm, corresponding to a strip pitch of less then 50 mu m. The R&D work to find the correct electroplating parameters for both in put and output bonding pads, to allow for automated wire bonding, as w ell as the results obtained during the SMD mass production are describ ed.