Developing a successful toxic monitoring strategy for semiconductor ma
nufacturing is neither easy nor straightforward. Different definitions
of hazards and varying acceptable exposure levels require that: safet
y professionals coordinate vast quantities of information. Federal fir
e codes and regulations may also be vague, and they can change signifi
cantly from year to year. Since monitoring systems exist to reduce ris
k and provide a safe working environment, there are times when minimal
compliance with regulations is not sufficient. To arrive at a safe an
d cost-effective solution, the specific requirements of each facility
need to be well understood, including facility air flows and sensor ch
aracteristics of the fire safety system. Though complete detection sys
tems are expensive, cutting corners is both dangerous and costly.