ANTIREFLECTIVE COATINGS - AN OVERVIEW

Authors
PERERA T
Citation
T. Perera, ANTIREFLECTIVE COATINGS - AN OVERVIEW, Solid state technology, 38(7), 1995, pp. 131
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
38
Issue
7
Year of publication
1995
Database
ISI
SICI code
0038-111X(1995)38:7<131:AC-AO>2.0.ZU;2-E
Abstract
In lithographic processing, antireflective films not only enable bette r linewidth control, but also allow realization of designs that were p reviously impossible to print. This article discusses both top and bot tom layer antireflective coatings for lithographic applications.