MECHANISMS FOR HIGHLY IONIZED MAGNETRON SPUTTERING

Authors
HOPWOOD J QIAN F
Citation
J. Hopwood et F. Qian, MECHANISMS FOR HIGHLY IONIZED MAGNETRON SPUTTERING, Journal of applied physics, 78(2), 1995, pp. 758-765
Citations number
33
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
2
Year of publication
1995
Pages
758 - 765
Database
ISI
SICI code
0021-8979(1995)78:2<758:MFHIMS>2.0.ZU;2-A