CHARACTERIZATION OF ANISOTROPIC STRESS AROUND SI TRENCHES BY POLARIZED RAMAN-SPECTROSCOPY

Authors
YOSHIKAWA M MAEGAWA M KATAGIRI G ISHIDA H
Citation
M. Yoshikawa et al., CHARACTERIZATION OF ANISOTROPIC STRESS AROUND SI TRENCHES BY POLARIZED RAMAN-SPECTROSCOPY, Journal of applied physics, 78(2), 1995, pp. 941-944
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
2
Year of publication
1995
Pages
941 - 944
Database
ISI
SICI code
0021-8979(1995)78:2<941:COASAS>2.0.ZU;2-R