NMR CHARACTERIZATION OF DOPED SIO2 USED IN INTEGRATED-CIRCUITS

Authors
SCHILLING FC STEINER KG OBENG YS
Citation
Fc. Schilling et al., NMR CHARACTERIZATION OF DOPED SIO2 USED IN INTEGRATED-CIRCUITS, Journal of applied physics, 78(2), 1995, pp. 1303-1311
Citations number
30
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
2
Year of publication
1995
Pages
1303 - 1311
Database
ISI
SICI code
0021-8979(1995)78:2<1303:NCODSU>2.0.ZU;2-R