PRESENTATION OF 2 INTERFEROMETRIC METHODS USED FOR THE CHARACTERIZATION OF MECHANICAL-PROPERTIES OF THIN-FILMS WITH BULGE TESTS - APPLICATION TO SILICON SINGLE-CRYSTAL
E. Bonnotte et al., PRESENTATION OF 2 INTERFEROMETRIC METHODS USED FOR THE CHARACTERIZATION OF MECHANICAL-PROPERTIES OF THIN-FILMS WITH BULGE TESTS - APPLICATION TO SILICON SINGLE-CRYSTAL, Journal de physique. III, 5(7), 1995, pp. 953-983
Citations number
27
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
Holographic interferometry and contouring are two optical methods used
to the characterization of mechanical properties of thin films. There
fore, a phase measurement interferometry applied to these methods is e
xposed. These solutions are discussed in terms of accuracy and sensibi
lity. An application on a bulge test, widely used in micro-mechanic st
udies, is proposed and experimental results on single crystal silicon
thin films are compared with finite element calculations. In each case
, the good agreement between theory and experiments allows to valid th
e apparatus.