PRESENTATION OF 2 INTERFEROMETRIC METHODS USED FOR THE CHARACTERIZATION OF MECHANICAL-PROPERTIES OF THIN-FILMS WITH BULGE TESTS - APPLICATION TO SILICON SINGLE-CRYSTAL

Holographic interferometry and contouring are two optical methods used to the characterization of mechanical properties of thin films. There fore, a phase measurement interferometry applied to these methods is e xposed. These solutions are discussed in terms of accuracy and sensibi lity. An application on a bulge test, widely used in micro-mechanic st udies, is proposed and experimental results on single crystal silicon thin films are compared with finite element calculations. In each case , the good agreement between theory and experiments allows to valid th e apparatus.