We describe a general method for the quantitative determination of the
interlayer mass transport in epitaxial growth. Through measurement of
the nucleation rate on top of islands as a function of island size an
d temperature, the additional barrier for an adatom to descend the ste
p edge Delta E(s) can be determined with high accuracy. This approach
is applied to the growth of Ag on the (111) surfaces of Ag and Pt. In
the homoepitaxial system, the barrier is found to be Delta E(s) = 120
+/- 15 meV, whereas in the heteroepitaxial case it is substantially lo
wered, Delta E(s) = 30 +/- 5 meV.