Oxygen solubilities in liquid Si-X (X=Sb, B, P and As) alloys equilibr
ated with solid silica (cristobalite) were determined in the temperatu
re range between 1693 and 1823 K. Si-X alloys were melted in a silica
crucible with oxygen gas flowing. After the equilibrium between a sili
con melt and silica was established, the contents of oxygen and the al
loying elements (X) in the silicon melt were determined. It was found
that the oxygen solubility increased with increasing alloying element
in the melt. The effect of the alloying elements on the oxygen solubil
ity was discussed thermodynamically.