DETERMINATION OF ELECTRON-INDUCED TOTAL SPUTTER YIELD OF LIF

Authors
NEIDHART T SPORN M SCHMID M VARGA P
Citation
T. Neidhart et al., DETERMINATION OF ELECTRON-INDUCED TOTAL SPUTTER YIELD OF LIF, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 101(1-2), 1995, pp. 127-130
Citations number
26
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
101
Issue
1-2
Year of publication
1995
Pages
127 - 130
Database
ISI
SICI code
0168-583X(1995)101:1-2<127:DOETSY>2.0.ZU;2-E
Abstract
We present measurements of the total sputter yield for LIF at 150 degr ees C induced by electrons with an impact energy between 10 and 500 eV . A nearly linear increase with kinetic energy has been measured. The decrease of the yield with increasing electron dose for energies below 100 eV is also shown. For very high electron dose the yield even beco mes zero and simultaneously a red coloration of the surface is observe d. Low energy ion scattering (LEIS) measurements at such a surface sho wed a Li enrichment to more than 90%. To reach such a composition with electrons between 40 and 80 eV kinetic energy sputtering of about 20 monolayers LiF is necessary.