DOUBLE PERIOD RHEED OSCILLATIONS DURING MBE GROWTH OF GAAS AND ALAS ON THE GAAS(110) SURFACE

Citation
H. Yang et al., DOUBLE PERIOD RHEED OSCILLATIONS DURING MBE GROWTH OF GAAS AND ALAS ON THE GAAS(110) SURFACE, Surface science, 333, 1995, pp. 479-484
Citations number
13
Categorie Soggetti
Chemistry Physical
Journal title
ISSN journal
00396028
Volume
333
Year of publication
1995
Part
A
Pages
479 - 484
Database
ISI
SICI code
0039-6028(1995)333:<479:DPRODM>2.0.ZU;2-Z
Abstract
Molecular beam epitaxy (MBE) of GaAs and AlAs on the GaAs(110) surface has been studied in situ using reflection high-energy electron diffra ction (RHEED). Additionally ex situ atomic force microscopy (AFM) has been employed to investigate the surface topography after the growth. During the growth complex RHEED oscillations with a single and a doubl e period can be measured, depending on the diffraction feature that is monitored. The AFM images of the surface reveal mono- and bilayer hig h steps and islands, reflecting a layer-by-layer growth with the parti cipation of both at the same time. A simple model that leads to a qual itative understanding of the experimental observation is presented.