Molecular beam epitaxy (MBE) of GaAs and AlAs on the GaAs(110) surface
has been studied in situ using reflection high-energy electron diffra
ction (RHEED). Additionally ex situ atomic force microscopy (AFM) has
been employed to investigate the surface topography after the growth.
During the growth complex RHEED oscillations with a single and a doubl
e period can be measured, depending on the diffraction feature that is
monitored. The AFM images of the surface reveal mono- and bilayer hig
h steps and islands, reflecting a layer-by-layer growth with the parti
cipation of both at the same time. A simple model that leads to a qual
itative understanding of the experimental observation is presented.