A photoemission study was performed in order to investigate the intera
ction of arsenic with InP(110) at room temperature. Formation of a sat
urated layer of As has been observed, which consists of two different
species of As. The adsorbed layer is stable during annealing to temper
atures up to 250 degrees C. Annealing to higher temperatures is accomp
anied by both a significant loss of arsenic from the surface due to de
sorption and partial incorporation into surface sites of the substrate
. The electronic structure of the annealed surface is hardly affected,
although As has been incorporated into the semiconductor. The results
are discussed in comparison with recent experimental and theoretical
investigations.