The adsorption of Sb on InAs(110) was studied for room temperature (RT
) deposition and subsequent annealing using high-resolution soft X-ray
photoemission (SXPS). A line shape analysis of the Sb 4d core level e
mission reveals that the Sb deposition at RT does not lead to perfectl
y ordered growth of the first monolayer. Subsequent annealing, however
, results in a highly ordered first monolayer which is stable up to 62
0 K. This was confirmed by the Sb 4d core level emission line shape co
nsisting of two well resolved chemically shifted components, which can
be assigned to two different adsorption sites in the epitaxial Sb mon
olayer. The changes of surface band bending were determined as a funct
ion of Sb coverage and annealing temperature revealing that an accumul
ation layer was formed. The geometrical structure of the epitaxial Sb
monolayers was investigated using low-energy photoelectron diffraction
, i.e. the intensity of the Sb 4d core level emission was monitored as
a function of polar angles and photon energy. The resulting patterns
which show strong variations for both components are compared to calcu
lations using a multiple scattering cluster model for different adsorp
tion models of the Sb monolayer.