KINETICS OF MOLYBDENUM SILYLATION .1. MOL YBDENUM SILYLATION AT THE TEMPERATURE LOWER THAN SILICON MELTING TEMPERATURE

Authors
KHARATYAN SL CHATILYAN AA DORUNTS AG
Citation
Sl. Kharatyan et al., KINETICS OF MOLYBDENUM SILYLATION .1. MOL YBDENUM SILYLATION AT THE TEMPERATURE LOWER THAN SILICON MELTING TEMPERATURE, Himiceskaa fizika, 14(5), 1995, pp. 137-144
Citations number
14
Categorie Soggetti
Physics, Atomic, Molecular & Chemical
Journal title
Himiceskaa fizika → ACNP
ISSN journal
0207401X
Volume
14
Issue
5
Year of publication
1995
Pages
137 - 144
Database
ISI
SICI code
0207-401X(1995)14:5<137:KOMS.M>2.0.ZU;2-G