Hh. Afify et al., CHARACTERIZATION OF INDIUM-DOPED TIN OXIDE-FILMS PREPARED BY SPRAY-PYROLYSIS, Indian Journal of Pure & Applied Physics, 33(3), 1995, pp. 120-124
Indium doped tin oxide films were prepared by pyrolytic decomposition
of a spray solution of chemically pure (MERCK) InCl3, SnCl4, C2H5OH an
d water at different deposition temperatures and time. The transmissio
n spectra of these films show a sharp decrease in transmission at the
absorption edge and a good form of interference pattern. The film thic
kness as well as the optical constants n, k and alpha are calculated f
rom the maxima and minima of the transmission spectra. Also the energy
gap 4.15 eV was obtained. These values are plotted as a function of s
ubstrate temperature in 637 K to 798 K range. The sheet resistance of
indium doped tin oxide films was three order of magnitude larger than
that of pure tin oxide. The obtained results are discussed in the ligh
t of the reported data in the literature.