CHARACTERIZATION OF INDIUM-DOPED TIN OXIDE-FILMS PREPARED BY SPRAY-PYROLYSIS

Indium doped tin oxide films were prepared by pyrolytic decomposition of a spray solution of chemically pure (MERCK) InCl3, SnCl4, C2H5OH an d water at different deposition temperatures and time. The transmissio n spectra of these films show a sharp decrease in transmission at the absorption edge and a good form of interference pattern. The film thic kness as well as the optical constants n, k and alpha are calculated f rom the maxima and minima of the transmission spectra. Also the energy gap 4.15 eV was obtained. These values are plotted as a function of s ubstrate temperature in 637 K to 798 K range. The sheet resistance of indium doped tin oxide films was three order of magnitude larger than that of pure tin oxide. The obtained results are discussed in the ligh t of the reported data in the literature.