Ai. Ivashchenco et al., RELATIONS BETWEEN STRUCTURAL AND ELECTRONIC-PROPERTIES OF SNO2 POLYCRYSTALLINE THIN-FILMS PREPARED BY THE AEROSOL MOCVD TECHNIQUE, Thin solid films, 263(1), 1995, pp. 122-126
Thin polycrystalline films of undoped SnO2 have been prepared by aeros
ol metal-organic chemical vapour deposition on single-crystal MgO(100)
and glass ceramic substrates at deposition temperatures T-s = 300-800
degrees C. From electrical and X-ray diffraction measurements, the ef
fect of substrate nature and T-s on the electronic and structural para
meters was studied. The size of crystalline grains and their bulk elec
trophysical characteristics were weakly dependent on the substrate nat
ure and T-s. At the same time, preferential grain orientation and subs
equently film texture character were determined by the above-mentioned
factors. The observed behavior of the film's electrical properties an
d gas sensitivity was attributed to a variation of texture character.