CHEMICAL-REACTIONS OF HYDROGENOUS SPECIES IN THE SI SIO2 SYSTEM/

Recent studies involving hydrogen and its compounds in the Si/SiO2 sys tem are examined as a basis for a comprehensive model of hydrogen phys ical chemistry in the system. A model will require resolution of contr adictions among experimental findings on passivation of P-b centers, r adiation damage mechanisms, diffusion, and physisorption and chemisorp tion in the SiO2 lattice. New findings on bias-temperature instability suggest approaches which may resolve some key problems.