Ballistic electron emission microscopy (BEEM) is a relatively new tech
nique enabling spectroscopic investigation of subsurface interface str
uctures and electronic properties. BEEM is a direct, nondamaging metho
d with nanometer spatial resolution. In this paper, an inexpensive mod
ification to a conventional scanning tunneling microscope, converting
it to a BEEM, is presented. BEEM performance is significantly affected
by the, preamplifier and the low-pass filter, which is used to improv
e the signal-to-noise ratio. The system is tested on a thin Au metalli
zation to (100) Si. (C) 1995 American Institute of Physics.