Based on the description of photothermal image formation as a convolut
ion between a defect distribution and the photothermal point spread fu
nction, a technique is presented by which subsurface thermal inhomogen
eities can be quantitatively reconstructed from photothermal images. N
umerical simulations demonstrate the performance and the limits of the
suggested approach. Experimental results obtained from a low thermal
contrast sample are presented and compared with the theory. (C) 1995 A
merican Institute of Physics.