Mj. Heintz et al., RADIO-FREQUENCY-POWERED PLANAR-MAGNETRON GLOW-DISCHARGE AS A SOURCE FOR TIME-OF-PLIGHT ELEMENTAL MASS-SPECTROMETRY, Applied spectroscopy, 49(7), 1995, pp. 945-954
A radio-frequency (rf) planar-magnetron glow discharge was investigate
d as an ion source for time-of-flight mass spectrometry. The first sta
ge of a conventional ICP-MS interface was modified to create a planar-
magnetron glow-discharge cell. The pressure and power of the magnetron
source were optimized for ion signal. The perpendicular geometry of t
he mass spectrometer enables the relative energies of the extracted io
ns to be determined; the energies of the argon support gas and analyte
ions were compared. The figures of merit for the system were investig
ated, and detection limits of 0.1-1 ppm were achieved for elements in
a conducting matrix. Detection limits were an order of magnitude worse
for elements in an electrically insulating sample. Along with an init
ial survey of the major spectral interferents, the relative sensitivit
ies for different elements were determined. The source was also operat
ed at low pressures (0.01 Torr) in order to determine whether operatin
g in this pressure regime can be used to alleviate polyatomic interfer
ences.