20 keV N+ ions have been implanted on Fe-57 enriched Fe films and RF d
eposited on glass and NaCl substrates with various fluences up to 3.0X
10(16) N+/cm(2). Conversion electron Mossbauer spectroscopy and transm
ission electron microscopy measurements performed at room temperature
on the as-implanted samples reveal the presence of alpha-Fe, alpha'-ma
rtensite, and epsilon-Fe3-xN phases. alpha ''-Fe16N2 is only detected
after a subsequent annealing at 220 degrees C; alpha'-martensite with
a low nitrogen content appears as the precursor of alpha '', The addit
ional nitrogen content needed for this process is supplied by the epsi
lon phase. (C) 1995 American Institute of Physics.